Equipment and Processes

The Nanofab has a wide selection of deposition tools including ALD, sputtering, and e-beam evaporation. With thirteen sputtering systems and a massive inventory of targets, the Nanofab can accommodate most thin film deposition needs. Micron scale lithography is done on one of the three contact aligners, and the e-beam lithography system can take care of patterns down to 10 nm. Contact the lab for more details.

Machine List

Thin film deposition
5-Target Nanofab Sputtering System #1
5-Target Nanofab Sputtering System #2
5-Target Nanofab Sputtering System #3
5-Target Nanofab Sputtering System #4
5-Target Nanofab Sputtering System #5
6-Target Nanofab Sputtering System
Anatech Hummer Gold Coater
Cambridge Nanotech Fiji Atomic Layer Deposition System
Commonwealth Scientific Ion Beam Deposition System
CVC Connexion Sputtering System
Leybold Heraeus Z-400 Sputtering System
Leybold Heraeus Z-400 Sputtering System #2
Leybold Heraeus Z-650 Sputtering System
Perkin Elmer 6J Sputtering System
Perkin Elmer 8L Sputtering System
SCS Labcoter 2 Parylene Deposition System
Tegal AMS Aluminum Nitride Sputtering System
Trion Orion II PECVD
Ultek E-Beam Evaporator
Dry etching
Plasma-Therm Versaline ICP RIE
STS Aspect AOE
STS Aspect ICP
STS Multiplex ICP RIE
Micrion 2500 Focused Ion Beam System
Commonwealth Scientific Ion Mill
Commonwealth Scientific Ion Mill #2
Plasma-Therm 790 RIE
Trion Phantom II RIE
IPC Barrel Etcher
Electron beam lithography
FEI Sirion 600 SEM / JC Nabity NPGS E-Beam Lithography
FEI Sirion 400 SEM / JC Nabity NPGS E-Beam Lithography
Photolithography
Nikon NSR-1505G4 Stepper
Heidelberg DWL 66FS Laser Lithography System
Heidelberg DWL 66 Laser Lithography System
Karl Süss MA6/BA6 Contact Aligner
Karl Süss MA56 Contact Aligner
Karl Süss MJB3 Contact Aligner
YES HMDS Vapor Prime Vacuum Oven
CEE 100 Spray Developer
CEE 100CB Table Top Spinner/Hotplate
CEE 100CB Bench Mount Spinner/Hotplate
Solitec Photoresist Spinner
Despatch Convection Oven - 90 ºC
Blue M Oven - 120 ºC
Photoresist Refrigerator
Thermal processing
AG Heat Pulse 610i Rapid Thermal Annealer
Micro Magnetics SpinTherm 1000 Magnetic Annealing System
2" Tube Annealing Furnace
Blue M Variable Temp Ovens
Hot Pack Vacuum Oven
Hotplates
Chemical mechanical planarizing
Strasbaugh 6EC CMP
Electroplating
Copper Electroplating Bath
Inspection
FEI Sirion 600 SEM / JC Nabity NPGS E-Beam Lithography
FEI Sirion 400 SEM / JC Nabity NPGS E-Beam Lithography
Olympus MX80 Inspection Microscope
Olympus BH Inspection Microscope
Olympus Widefield Zoom Microscope
Micromanipulator Probe Stations
Metrology
KLA Tencor P-15 Profilometer
Tencor P-2 Profilometer
Tencor Alpha-Step 200 Profilometer
Nanometrics Nanospec 210XP
Tencor Surfscan 6225
Wet Chemistry
4' Wet Benches
Acid Wet Bench
Developer Wet Bench
Semitool 870 Spin Rinser/Dryer
Semitool 880 Spin Rinser/Dryer
Semitool 270 Spin Rinser/Dryer
Solvent Wet Bench (Bay 2)
Solvent/Spinner Wet Bench
Tousimis Critical Point Dryer
Post processing
Kulicke & Soffa 782-6 Dicing Saw
Micromech Diamond Saw