Equipment : Perkin Elmer 6J Sputtering System

Overview

  • Three targets, dedicated to Pt and Au depo with one adhesion layer
  • 6" substrate table, sputter down configuration
  • 8" cryo pump
  • 500 W DC power supply, 600 W RF power supply, sputter etch

Please consult Nanofab staff for process specifics.

Tool image(s)