Equipment : Tencor Alpha Step 200 Profilometer

Overview

  • 150 mm sample table
  • Measures steps from 200 Å to 200 μm
  • Maximum sample thickness 10 mm
  • Minimum sample length 25 mm (see staff for smaller samples)
  • Surface roughness measurement

Please consult Nanofab staff for process specifics.

Tool image(s)