Equipment : 8' Solvent Wet Bench (Wet Chemistry Bay)
- For solvent cleaning and photoresist spinning
- No developers except for SU-8 and PMMA
- CEE 100CB spinner/hotplate and Solitec spinner mounted in the bench
- Exhausted bench top and wells
- Nitrogen guns, ultrasonic bath, process timers
Please consult Nanofab staff for process specifics.