Equipment : Micrion 2500 Focused Ion Beam System
- Gallium FIB system with 5 nm resolution, 50 kV beam voltage
- 3" sample stage, load lock, turbo pump
- Writes user defined patterns and imported bitmaps (.xbm)
- Operated on Tuesdays with a minimum 2 hour signup required.
Please consult Nanofab staff for process specifics.