Equipment : Micrion 2500 Focused Ion Beam System

Overview

  • Gallium FIB system with 5 nm resolution, 50 kV beam voltage
  • 3" sample stage, load lock, turbo pump
  • Writes user defined patterns and imported bitmaps (.xbm)
  • Operated on Tuesdays with a minimum 2 hour signup required.

Please consult Nanofab staff for process specifics.

Tool image(s)