Equipment : Anatech Hummer VI Gold Coater

Overview

  • Deposits a very thin film of gold for imaging samples under SEM or FIB
  • Holds up to one 3" wafer; mounting holes for SEM sample studs
  • Quick process, approximately 20 minutes to complete a cycle.

Available Targets: Au.

Please consult Nanofab staff for process specifics.

Tool image(s)