Equipment : Micromanipulator Probe Systems

Overview

  • Pyrex probe tips can be made down to a 2 μm radius
  • Fine control of probe position via hydraulic micromanipulator
  • CCD output to video monitor
  • Electronic zoom
  • Used for testing release of MEMS structures, cleaning surface contaminants
  • Two systems: One with single probe, one with two probes

Please consult Nanofab staff for process specifics.

Tool image(s)