Equipment : Micromanipulator Probe Systems
- Pyrex probe tips can be made down to a 2 μm radius
- Fine control of probe position via hydraulic micromanipulator
- CCD output to video monitor
- Electronic zoom
- Used for testing release of MEMS structures, cleaning surface contaminants
- Two systems: One with single probe, one with two probes
Please consult Nanofab staff for process specifics.