Equipment : Nanometrics Nanospec 210XP

Overview

  • White light and UV spectro-reflectometer
  • For measuring thickness of oxides, nitrides, and photoresists
  • 4" sample and calibration standard tables
  • Measures transparent films down to 100 Å (standard) or 10 Å (UV)
  • 5x, 10x, 20x, and 15x (reflector) objectives
  • User may enter refractive index
  • Customizable recipes for bilayer films

Please consult Nanofab staff for process specifics.

Tool image(s)