Equipment : Olympus MX-80 Microscope

Overview

  • 1.25x, 5x, 10x, 20x, 50x, and 100x objectives, 10x binocular eyepiece
  • Optronics MagnaFire camera with capture software
  • ImagePro Plus image analysis software
  • Dark field available for 5x through 100x objectives
  • Includes Nomarski imaging for 5x through 100x objectives
  • Top and bottom illumination
  • UV filter for imaging photoresist
  • Photo printer

Please consult Nanofab staff for process specifics.

Tool image(s)