Equipment : Tencor P-2 Profilometer

Overview

  • 200 mm sample table with vacuum
  • Measures steps from 100 Å to 300 μm
  • Maximum sample thickness 20 mm
  • Minimum sample length 25 mm (see staff for smaller samples)
  • 3D scan option

Please consult Nanofab staff for process specifics.

Tool image(s)