Equipment : Leybold Heraeus Z-400 #1
- Four targets, 75 mm, RF or DC
- Load-lock, liquid nitrogen Meissner trap, turbo pump
- Substrate heater (500°C max.)
- 500 W DC power supplies, 600 W RF power supplies, substrate bias
Available Targets: Please discuss with the staff.
Please consult Nanofab staff for process specifics.