HOME | NEWS | PEOPLE | LABS | EQUIPMENT | DOCUMENTATION | GAINING ADMITTANCE | CONTACT

The map below shows the overall layout of the cleanroom. Click on a bay for more information and to link to information on individual pieces of equipment.

Cleanroom Facilities
COMPRESSED AIR 100 psi, dual oil-free compressors, twin tower air dryer, dew point meter, -100° F dewpoint, double filtration, plumbed along each wall with multiple ports and point of use regulators NITROGEN GAS Generated from vaporizer at bulk LN2 tank, regulated at 75psi, plumbed along each wall with multiple ports and point of use regulators DEIONIZED WATER 18 Mohm, reverse osmosis feed, .2 µ filtration, ports on each wall, plumbed to each of eight wet benches PROCESS VACUUM 20" Hg vacuum, dual pumping system, plumbed along each wall with multiple ports PROCESS CHILLED WATER 100 kohm, DI makeup, 85 psi supply, 10 psi return, 5 µ filtration, plumbed with multiple ports along each wall with point of use regulators LIQUID NITROGEN 1500 gal bulk liquid nitrogen tank, vaporizer for 75 psi nitrogen gas, LN2 fill station, LN2 is dispensed by the pound from an LS160 dewar on a scale EXHAUST Three separate exhaust fans, stainless steel corrosive exhaust system, galvanized solvent exhaust, stainless steel toxic exhaust, loss of exhaust alarm	ENVIRONMENTAL CONTROLS Temperature 68° F ± 1° F, Humidity 35% ± 3% RH, digital controls located in each bay, 0.1° F and 1% RH resolution, chilled mirror RH meter for calibration reference HVAC SYSTEM Nine air handlers / one for each bay, 45° F campus chilled water to coils at each air handler for sensible heat temperature control, separate make up air unit for humidity control with variable speed fan for room pressurization and air balancing, dual totally redundant chillers for 32° F glycol chilled water system to make up air unit for humidity control, steam humidification to each air handler, 100 ft/min laminar air flow ELECTRICAL 200A 3Ø 5 wire panel for each bay, separate feeds for large equipment, emergency disconnect remote switch for each machine, emergency disconnect remote switch for each bay/panel, master emergency disconnect switch located in change room for all bays/panels CENTRAL VACUUM CLEANER Port located in each bay and chase, remote control switch located in change room CONDUCTIVE FLOORING Welded seams, tested to 25 kohm - 1 Mohm between electrodes INTERCOM Master control panel located in lounge, speaker/microphone located in each bay

Carnegie Mellon Nanofabrication Facility ECE Department Pittsburgh, PA 15213-3891 USA 412-268-2471 - (FAX) 412-268-4323 copyright 2006 Carnegie Mellon