Carnegie Mellon University

5-Target Nanofab Sputtering System #2

  • Five targets, RF or DC, 5" or 75 mm
  • Single substrate, 1" wafer or smaller
  • Substrate heater, up to 800 °C
  • Programmable substrate positioning and multilayer timing
  • Variable target-substrate distance
  • 8" cryo pump
  • 500 W DC power supplies, 600 W RF power supplies, substrate bias
  • Secondary sputtering gas available
Available Targets: Please discuss with the staff.
Please consult Nanofab staff for process specifics.