Carnegie Mellon University ———
College of Engineering  ›  Claire & John Bertucci Nanotechnology Laboratory  ›  Facilities & Equipment  ›  Tegal Aluminum Nitride Sputtering System
Tegal AMS Aluminum Nitride Sputtering System

Overview
  • Aluminum nitride deposition system with load lock
  • Highly ordered, low stress films
  • 4" wafers only
Please consult Nanofab staff for process specifics.