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Claire & John Bertucci Nanotechnology Laboratory
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Claire & John Bertucci Nanotechnology Laboratory
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Facilities & Equipment
› Tencor Alpha-Step 200 Profilometer
Tencor Alpha Step 200 Profilometer
Overview
150 mm sample table
Measures steps from 200 Å to 200 μm
Maximum sample thickness 10 mm
Minimum sample length 25 mm (see staff for smaller samples)
Surface roughness measurement
Please consult
Nanofab staff
for process specifics.
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Claire & John Bertucci Nanotechnology Laboratory
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