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College of Engineering  ›  Claire & John Bertucci Nanotechnology Laboratory  ›  Facilities & Equipment  ›  Tencor Alpha-Step 200 Profilometer

Tencor Alpha Step 200 Profilometer

Overview
  • 150 mm sample table
  • Measures steps from 200 Å to 200 μm
  • Maximum sample thickness 10 mm
  • Minimum sample length 25 mm (see staff for smaller samples)
  • Surface roughness measurement
Please consult Nanofab staff for process specifics. 

Tencor Alpha Step 200 Profilometer