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ASML 5500/80 i-Line Wafer Stepper 

Overview
  • 500nm resolution and <70nm alignment accuracy
  • Set up for 4” wafers but convertible to 3” or 6” platforms
  • 21mm x 21mm field size
  • 1.3µm depth of focus
Please consult Nanofab staff for process specifics. 
ASML 5500/80 i-Line Wafer Stepper  
ASML 5500/80 i-Line Wafer Stepper

ASML 5500/80 i-Line Wafer Stepper