Carnegie Mellon University
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Claire & John Bertucci Nanotechnology Laboratory
College of Engineering
College of Engineering
›
Claire & John Bertucci Nanotechnology Laboratory
›
Facilities & Equipment
› Tousimis Automegasamdri-915B Critical Point Dryer
Tousimis Automegasamdri-915B Critical Point Dryer
Overview
Automated critical point drying system
Any substrate up to 150 mm wafer
Please consult
Nanofab staff
for process specifics.