Carnegie Mellon University

Micrion 2500 Focused Ion Beam System

  • Gallium FIB system with 5 nm resolution, 50 kV beam voltage
  • 3" sample stage, load lock, turbo pump
  • Writes user defined patterns and imported bitmaps (.xbm)
  • Operated on Tuesdays with a minimum 2 hour signup required.
Please consult Nanofab staff for process specifics.