Carnegie Mellon University

Anatech Hummer VI Gold Coater

Overview
  • Deposits a very thin film of gold for imaging samples under SEM or FIB
  • Holds up to one 3" wafer; mounting holes for SEM sample studs
  • Quick process, approximately 20 minutes to complete a cycle.
Available Targets: Au.
Please consult Nanofab staff for process specifics.