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Claire & John Bertucci Nanotechnology Laboratory
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College of Engineering
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Claire & John Bertucci Nanotechnology Laboratory
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Facilities & Equipment
› GVD iLab CVD System
GVD iLab CVD System
Overview
Runs an initiated CVD process for the conformal growth of polymers
Features two heated monomer MFCs and one initiator MFC
Laser monitoring of film growth
Substrate cooling down to -25 C
Please consult
Nanofab staff
for process specifics.
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Claire & John Bertucci Nanotechnology Laboratory
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