Carnegie Mellon University ———
College of Engineering  ›  Claire & John Bertucci Nanotechnology Laboratory  ›  Facilities & Equipment  ›  GVD iLab CVD System

GVD iLab CVD System

Overview
  • Runs an initiated CVD process for the conformal growth of polymers 
  • Features two heated monomer MFCs and one initiator MFC
  • Laser monitoring of film growth
  • Substrate cooling down to -25 C
Please consult Nanofab staff for process specifics. 

GVD iCVD System

GVD iCVD System