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Claire & John Bertucci Nanotechnology Laboratory
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Claire & John Bertucci Nanotechnology Laboratory
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Facilities & Equipment
› Commonwealth Scientific Ion Mill
Commonwealth Scientific Ion Mill
Overview
Holds one 3" wafer on a water cooled chuck
16 cm Kaufman-type ion gun
Please consult
Nanofab staff
for process specifics.
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Claire & John Bertucci Nanotechnology Laboratory
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