Carnegie Mellon University
Navigation
—
—
—
Search
Search
Search this site only
Claire & John Bertucci Nanotechnology Laboratory
College of Engineering
About
Access & Fees
Research
Facilities & Equipment
Events
Contact
College of Engineering
›
Claire & John Bertucci Nanotechnology Laboratory
›
Facilities & Equipment
› Karl Süss MA56 Contact Aligner
Karl Süss MA56 Contact Aligner
Overview
4" wafer chuck, 5" mask holder
365 nm UV at 5 mW/cm
2
Motorized mask and microscope movement, better than 0.8 μm alignment
Please consult
Nanofab staff
for process specifics.
—
—
—
Search
Search
Search this site only
Claire & John Bertucci Nanotechnology Laboratory
▾
▾
About
Access & Fees
Internal CMU Researcher Access
External Researcher Access
Research
Facilities & Equipment
Equipment
Facilities
Events
Past Seminars: 2018
Past Seminars: 2017
Past Seminars: 2015
Past Seminars: 2016
Past Seminars: 2014
Past Seminars: 2019
Contact