Carnegie Mellon University ———
College of Engineering  ›  Claire & John Bertucci Nanotechnology Laboratory  ›  Facilities & Equipment  ›  Karl Süss MA56 Contact Aligner

Karl Süss MA56 Contact Aligner

Overview
  • 4" wafer chuck, 5" mask holder
  • 365 nm UV at 5 mW/cm2
  • Motorized mask and microscope movement, better than 0.8 μm alignment
Please consult Nanofab staff for process specifics. 

Karl Süss MA56 Contact Aligner