Karl Süss MA6/BA6 Contact Aligner
Overview- Top-side and bottom-side aligner plus Near Field Holography option
- chip/3", 4", and 6" wafer trays
- 4", 5", and 7" mask holders
- UV300 filter, 320 nm at 5 mW/cm2
- CCD camera output to video monitor
- Motorized microscopes, micrometer driven wafer stage with 0.5 μm alignment
