Carnegie Mellon University ———
College of Engineering  ›  Claire & John Bertucci Nanotechnology Laboratory  ›  Facilities & Equipment  ›  Karl Süss MJB3 Contact Aligner

Karl Süss MJB3 Contact Aligner

Overview
  • Chip, 1", 2", and 3" wafer chucks
  • 2"-4" mask holders
  • 320 nm UV at 10 mW/cm2
Please consult Nanofab staff for process specifics. 

Karl Süss MJB3 Contact Aligner