Nanometrics Nanospec 210XP
Overview- White light and UV spectro-reflectometer
- For measuring thickness of oxides, nitrides, and photoresists
- 4" sample and calibration standard tables
- Measures transparent films down to 100 Å (standard) or 10 Å (UV)
- 5x, 10x, 20x, and 15x (reflector) objectives
- User may enter refractive index
- Customizable recipes for bilayer films
