Carnegie Mellon University ———
College of Engineering  ›  Claire & John Bertucci Nanotechnology Laboratory  ›  Facilities & Equipment  ›  Blue M Oven 120 °C

Blue M Oven 120 °C

Overview
  • Maintained at 120 °C
  • Used primarily for wafer dehydration and hard baking photoresist
Please consult Nanofab staff for process specifics. 

Blue M Oven 120 °C