Carnegie Mellon University ———
College of Engineering  ›  Claire & John Bertucci Nanotechnology Laboratory  ›  Facilities & Equipment  ›  KLA Tencor P-15 Profilometer

KLA Tencor P-15 Profilometer

Overview
  • 200 mm sample table with vacuum
  • Measures steps from 100 Å to 300 μm
  • Maximum sample thickness 20 mm
  • Minimum sample length 25 mm (see staff for smaller samples)
Please consult Nanofab staff for process specifics. 

KLA Tencor P-15 Profilometer