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College of Engineering  ›  Claire & John Bertucci Nanotechnology Laboratory  ›  Facilities & Equipment  ›  Copper Electroplating Bath

Copper Electroplater

Overview
  • Custom design
  • 3" wafer holder / cathode
  • 4" solid copper anode
  • Pulsed DC power supply
  • Variable cathode - anode distance
  • Recirculating pump and filter
Please consult Nanofab staff for process specifics. 

 Copper Electroplater