Carnegie Mellon University ———
College of Engineering  ›  Claire & John Bertucci Nanotechnology Laboratory  ›  Facilities & Equipment  ›  Semitool 870 Spin Rinser/Dryer

Semitool 870 Spin Rinser/Dryer

Overview
  • 3" and 4" wafer boats
  • Rinses substrates in DI water to 15 MΩ
  • Dries with heated nitrogen
Please consult Nanofab staff for process specifics. 

Semitool 870 Spin Rinser/Dryer