Carnegie Mellon University ———
College of Engineering  ›  Claire & John Bertucci Nanotechnology Laboratory  ›  Facilities & Equipment  ›  Semitool 880 Spin Rinser/Dryer

Semitool 880 Spin Rinser/Dryer

Overview
  • 4" and 5" mask boats, plus 6" wafer boat on request
  • Rinses masks and wafers in DI water to 15 MΩ
  • Dries with heated nitrogen
Please consult Nanofab staff for process specifics. 

Semitool 880 Spin Rinser/Dryer