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Semitool 880 Spin Rinser/Dryer

Overview
  • 4" and 5" mask boats, plus 6" wafer boat on request
  • Rinses masks and wafers in DI water to 15 MΩ
  • Dries with heated nitrogen
Please consult Nanofab staff for process specifics. 

Semitool 880 Spin Rinser/Dryer