Carnegie Mellon University ———
College of Engineering  ›  Claire & John Bertucci Nanotechnology Laboratory  ›  Facilities & Equipment  ›  Trion Orion II PECVD
Trion Orion PECVD System

Overview
  • 8" chuck
  • Substrate heater (375°C max.)
  • Deposits SiO2 and SixNy
Please consult Nanofab staff for process specifics. 

 

 Trion Orion PECVD System