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Claire & John Bertucci Nanotechnology Laboratory
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Claire & John Bertucci Nanotechnology Laboratory
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Facilities & Equipment
› YES HMDS Vapor Prime Vacuum Oven
YES HMDS Vapor Prime Vacuum Oven
Overview
Vacuum oven maintained at 150 °C
Applies HMDS in vapor form for improved adhesion of photoresist
Used also for vacuum dehydration of wafers
Please consult
Nanofab staff
for process specifics.
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Claire & John Bertucci Nanotechnology Laboratory
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