Carnegie Mellon University ———
College of Engineering  ›  Claire & John Bertucci Nanotechnology Laboratory  ›  Facilities & Equipment  ›  YES HMDS Vapor Prime Vacuum Oven

YES HMDS Vapor Prime Vacuum Oven

Overview
  • Vacuum oven maintained at 150 °C
  • Applies HMDS in vapor form for improved adhesion of photoresist
  • Used also for vacuum dehydration of wafers
Please consult Nanofab staff for process specifics. 

YES HMDS Vapor Prime Vacuum Oven